Technology, Engineering, Agriculture, Industrial Processes, Mechanical Engineering and Materials, Materials Science
Surface Metrology for Micro- and Nanofabrication

Surface Metrology for Micro- and Nanofabrication

Paperback Published on: 21/10/2020
£172
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In stock
Print on demand - Usually dispatched within 7-10 days
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Synopsis

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

Publisher information

  • Publisher: Elsevier Science
  • ISBN: 9780128178508
  • Number of pages: 450
  • Dimensions: 235 x 191 x 23 mm
  • Weight: 910g
  • Languages: English