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Low Dielectric Constant Materials for IC Applications

Low Dielectric Constant Materials for IC Applications

Paperback Published on: 04/10/2012
£129.99
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Synopsis

Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for

Publisher information

  • Publisher: Springer Berlin Heidelberg
  • ISBN: 9783642632211
  • Number of pages: 310
  • Dimensions: 234 x 156 x 17 mm
  • Weight: 510g
  • Languages: English