Beam Injection Assessment of Defects in Semiconductors

Martin Kittler (editor-in-chief), Otwin Breitenstein (editor-in-chief), A. Endrös (editor-in-chief), Wolfgang Schröter (editor-in-chief)

Paperback Published on: 18/12/1998

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Synopsis

The 5th International Workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98) focussed on many theoretical and experimental aspects of this topic. The aim was to bring together specialists working in the fields of both fundamental research and applications. There were more than 80 participants from 15 countries all over the world.

Publisher information

Publisher: Trans Tech Publications Ltd
ISBN: 9783908450399
Number of pages: 550
Dimensions: 245 x 172 x 28 mm
Weight: 1260g
Languages: English